Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Claudia Keibler-Willner

Emmy Törker

Mario Baum

Franz Selbmann

A layer system includes barrier properties against oxygen and water vapor. There may be an alternating layer system of at least two aluminum oxide layers and at least two titanium oxide layers. The aluminum oxide layers and the titanium oxide layers are deposited alternately on top of one another. The aluminum oxide layers and the titanium oxide layers are deposited by ALD layer deposition with a layer thickness of 5 nm to 20 nm. A first Parylene layer is deposited with a layer thickness of 0.1 μm to 50 μm on a first side of the alternating layer system by CVD.

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Dresden, Germany

Claudia Keibler-Willner