Average Co-Inventor Count = 4.36
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (2 from 3,768 patents)
2 patents:
1. 12400842 - Method of cleaning chamber components with metal etch residues
2. 7507670 - Silicon electrode assembly surface decontamination by acidic solution