Industrial Technology Research Institute

National Taipei University of Technology

Chun-Tai Lien

Liang-Chia Chen

Jin-Liang Chen

Huang-Chi Huang

Huang-Wen Lai

Yong-Tong Zou

A exemplary method for determining vibration displacement in interferometric scanning, in which two optical signals having a phase difference with each other of a high-coherence interferogram corresponding to a tested surface is detected for determining a shifting displacement between the reference plane of interferometric apparatus and the tested surface. In one embodiment, a series of the shifting displacements with respect to a time interval are measured for determining the vibrating frequency of the tested surface by spectrum analysis. Meanwhile, an exemplary interferometric apparatus is also disclosed for calculating the relative position between the tested surface and the reference plane of interferometric apparatus whereby the interferometric apparatus is capable of compensating influences of vibration caused by the environment or the tested surface itself so as to obtain the surface profile and vibration frequency of the tested surface.

Growing community of inventors

Taipei County, Taiwan

Chun-Tai Lien