National Applied Research Laboratories

Chun-Li Chang

Chi-Hung Huang

Tai-Shan Liao

Wei-Chung Wang

Chun-Fu Lin

Shih-Jie Chou

Jyh-Rou Sze

Ming-Hsing Shen

Hung-Ji Huang

A flexible optical measuring device comprises an optical distance measuring module, an optical fiber adapter and an optical coupling module. The optical distance measuring module comprises a light source, an optical receiver and a computing unit. The optical fiber adapter is disposed and connected between the optical distance measuring module and the optical coupling module. The optical coupling module comprises a first optical fiber, a two-in-one optical coupler, a detector and a second optical fiber. A measuring beam is emitted from the light source and reaches the detector. The measuring beam then passes through the detector to the object and forms a reflected beam which is reflected back to the detector, then enters the second optical fiber and passes through the optical receiver and the optical receiver outputs a measurement signal. The computing unit calculates the distance between the object and a terminal of the detector accordingly.

Flexible optical measuring device

An apparatus is provided for detecting transmittance of a trench. The trench is located on an infrared-transmittable material, which can be a wafer. The wafer is obtained after a ditching process. An image of the wafer is fetched. The contrast of the image is greatly enhanced. The contrast-enhanced image is used for automated analysis of the transmittance of the trench. Accuracy of detecting the transmittance is improved. Hence, the present invention uses a simple structure to detect transmittance defects of the trench for ensuring goodness of the wafer.

Apparatus of detecting transmittance of trench on infrared-transmittable material and method thereof

The conventional white-light interferometer, confocal microscope, and ellipsometer are integrated as one device set in a functional sense, and the geometrical parameters conventionally measured may be deduced on the integrated device. Thus, the advantages and efficacies of equipment cost saving, on-line measuring, rapid monitoring, reduced manufacturing time, and reduced possibility of object damage during the manufacturing process may be secured, compared with the prior art.

Multi-functioned optical measurement device and method for optically measuring a plurality of parameters

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Hsinchu, Taiwan

Chun-Li Chang