University of Michigan

Christopher P Pannier

Kira Barton

Neil P Dasgupta

Eric Kazyak

Tae Han Cho

Lauren Ransohoff

Ellis Herman

Orlando Trejo

Mattison Rose

Tae H Cho

Carli Huber

An integrated electrohydrodynamic jet printing and spatial atomic layer deposition system for conducting nanofabrication includes an electrohydrodynamic jet printing station that includes an E-jet printing nozzle, a spatial atomic layer deposition station that includes a zoned ALD precursor gas distributor that discharges linear zone-separated first and second ALD precursor gases, a heatable substrate plate supported on a motion actuator controllable to move the substrate plate in three dimensions, and a conveyor on which the motion actuator is supported. The conveyor is operative to move the motion actuator between the electrohydrodynamic jet printing station and the spatial atomic layer deposition station so that the substrate plate is conveyable between a printing window of the E-jet printing nozzle and a deposition window of the zoned ALD precursor gas distributor, respectively. A method of conducting area-selective atomic layer deposition is also disclosed.

Integrated electrohydrodynamic jet printing and spatial atomic layer deposition system for area selective-atomic layer deposition

Growing community of inventors

Ann Arbor, MI, United States of America

Christopher P Pannier