Mitsubishi Chemical Corporation

Gelest, Inc.

Christopher Michael Caroff

Li Yang

Monoorgano tin trialkoxide compounds having chemical formula R'Sn(OR)and containing less than about 5 mol % diorgano tin dialkoxide are described. R′ is a linear or branched, optionally fluorinated, unsaturated hydrocarbon group having about 2 to about 20 carbon atoms and each R is independently a linear or branched, optionally fluorinated, alkyl group having about 1 to about 10 carbon atoms. Methods for synthesizing and purifying these compounds are also provided. The monoorgano tin compounds may be used for the formation of high-resolution EUV lithography patterning precursors and are attractive due to their high purity and minimal concentration of diorgano tin impurities.

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Yardley, PA, United States of America

Christopher Michael Caroff