Cymer, Inc.

Christopher G Rowan

Tom A Watson

Jason R Carlesi

Muljadi Tantra

Joseph Conway

Jeffrey W Moen

Parthiv S Patel

Roger L Green

A system for a monitoring lithography lasers at integrated circuit fabrication plants. Each laser at each fabrication plant has associated with it a terminal server. With respect to each fabrication plant a central control server unit is in communication with each of the lasers through a local area network. Information from the lasers is collected by the central control server unit and the information is used to provide summary information which is made available in a web site format to interested parties having access authorization.

Process monitoring system for lithography lasers

Growing community of inventors

Coronado, CA, United States of America

Christopher G Rowan