International Business Machines Corporation

Christopher E Pepe

David Clifford Long

Raschid Jose Bezama

Darryl D Restaino

Eric Peter Solecky

Roger M Young

Jason Scott Miller

Benjamin Paul Tongue

William W Harkins

Jonathan Levy

John A Rudy

Timothy L Holmes

William K Hoffman, Jr

Ronald M Rothkranz

A method for managing a metrology system includes receiving a part, identifying, with a processing device, a part type associated with the part, retrieving, with the processing device, test rule logic associated with the part type from a database, retrieving, with the processing device, measurement data associated with the identified part type, processing, with the processing device, the measurement data, applying, with the processing device, the test rule logic to the processed measurement data to determine whether the part should be measured, outputting the part responsive to determining that the part should not be measured, and incrementing, with the processing device, a counter and saving a value of the counter in the database responsive to outputting the part responsive to determining that the part should not be measured.

Metrology management

A method and apparatus for the rapid cooling of screen masks used in the fabrication of semiconductor components is provided. The method and apparatus use a specially designed cooling plate which is contacted with a mask frame holding the screening mask. After a heated cleaning step which cleans the mask frame and screening mask of metal paste used in the screening operation, the cooling plate having one or more concave lower surfaces contacts the upper surfaces of the mask frame and bends the mask frame in the shape of the concave surfaces. This ensures intimate contact between the cooling plate and mask frame and enhances the thermal efficiency of the cooling step.

Method and apparatus for rapid cooling of metal screening masks

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Montgomery, NY, United States of America

Christopher E Pepe