Entegris, Inc.

Chintan Patel

Patrick Doering

Christopher J Vroman

Chester L Bejtlich

David Trio

Matthew B Nicolas

Bradley H Wood

Christopher Vroman

A foam brush that has nodules on an outer diameter surface of the brush that have a pitch to diameter ratio (P/D) of between 1.2 and 1.5 and a nodule height to nodule diameter ratio of 0.2 to 0.5 can be used to achieve improved small particle and organic residue removal from substrates following CMP processing. CMP cleaning brushes of the disclosure may also be prepared with foams that are relatively soft and have a compression strength of less than 90 grams/cm. CMP cleaning brushes with such P/D and H/D ratios, and optionally a compression strength of less than 90 grams/cmcan be used in a variety of CMP cleaning processes including post copper CMP processes.

Nodule ratios for targeted enhanced cleaning performance

A method of packaging a CMP brush having a cylindrical brush portion and a pair of end connection portions. The method includes saturating the brush with a liquid; covering the cylindrical brush portion with a flexible sheet that extends around and engages the surface of the cylindrical portion; engaging each of the end connection portions with a respective end support; inserting the dampened brush into a rigid polymer tubular shipping container and supporting the end connection portions within the polymer tube; and providing an additional exterior self-supporting packaging.

CMP brush packaging

Growing community of inventors

Tyngsboro, MA, United States of America

Chintan Patel