Taiwan Semiconductor Manufacturing Comp. Ltd.

Ching-Kun Huang

Song-Bor Lee

Wei-Chih Lin

Shih-Che Lin

Cheng-Chien Li

Kai-Yu Cheng

Hung-Chih Yu

Shih-Kang Tien

Chih-Hung Lu

Sheng-Yuan Lin

Ching-Chen Hao

Chuan-Yi Lin

Yeou-Lang Hsieh

Jeng-Dong Sheu

A semiconductor structure includes a first dielectric layer, a first conductive via, a partial landing pad, a second dielectric layer, and a second conductive via. The first conductive via is disposed in the first dielectric layer. The partial landing pad is disposed on the first conductive via and the first dielectric layer, in which the partial landing pad has a top surface and a bottom surface, and the top surface of the partial landing pad has a width greater than or substantially equal to that of the bottom surface of the partial landing pad. The second dielectric layer is disposed on the partial landing pad. The second conductive via is disposed in the second dielectric layer and electrically connected to the partial landing pad.

Semiconductor structure and manufacturing method thereof

Semiconductor devices, transistors, and methods of manufacture thereof are disclosed. In one embodiment, a semiconductor device includes a gate dielectric disposed over a workpiece, a gate disposed over the gate dielectric, and a spacer disposed over sidewalls of the gate and the gate dielectric. A source region is disposed proximate the spacer on a first side of the gate, and a drain region is disposed proximate the spacer on a second side of the gate. A metal layer is disposed over the source region and the drain region. The metal layer extends beneath the spacers by about 25% or greater than a width of the spacers.

Semiconductor devices, transistors, and methods of manufacture thereof

An integrated circuit including a first transistor having a first gate dielectric layer with a first thickness. The integrated circuit also includes a second transistor having a second gate dielectric layer with a second thickness and the second transistor is configured to electrically connect to the first transistor. The integrated circuit also includes a third transistor having a third gate dielectric layer with a third thickness and the third transistor is configured to electrically connect to at least one of the first transistor or the second transistor. The first thickness, the second thickness and the third thickness of the integrated circuit are all different.

Integrated circuit having thinner gate dielectric and method of making

Disclosed herein is a method of processing a device, comprising providing a substrate having a buffer layer disposed on a back side and forming an outer protection layer over the back side of the buffer layer, forming a thermal layer on the back side of the outer protection layer and heating the substrate through the thermal layer and the back side of the outer protective layer. A back side protection layer may be formed on the back side of the buffer layer. The thermal layer has a thermal emissivity coefficient of about 0.7 or greater and a thickness greater than a roughness of the back side of the outer protection layer. The back side protection layer is an oxide with a thickness between about 20 angstroms and about 50 angstroms. The outer protection layer is a nitride with a thickness between about 50 angstroms and about 300 angstroms.

Wafer back side processing structure and apparatus

A method of forming a semiconductor device having a through-silicon via (TSV) is provided. A semiconductor device is provided having a first dielectric layer formed thereon. One or more dielectric layers are formed over the first dielectric layer, such that each of the dielectric layers have a stacking structure, wherein the stacking structures in the one or more dielectric layers are vertically aligned. The stacking structures may be, for example, metal rings. The stacking structures are then removed to form a first recess. A second recess is formed by extending the first recess into the substrate. The second recess is filled with a conductive material to form the TSV.

Method of forming through-silicon vias

A memory device includes a first memory cell area having a first latch area where one or more electronic components are constructed for storing a value, and a first peripheral area surrounding the first latch area; and a second memory cell area being disposed adjacent to a first side of the first memory cell area, and having a second latch area where one or more electronic components are constructed for storing a value, and a second peripheral area surrounding the second latch area. One edge of the first memory cell area shifts away from its corresponding edge of the second memory cell area. Thus, the area or yield rate of the memory device can be adjusted.

Growing community of inventors

Jhubei, Taiwan

Ching-Kun Huang