Taiwan Semiconductor Manufacturing Comp. Ltd.

Nuvoton Technology Corporation

Nyquest Technology Corporation Limited

Chin-Yung Chang

Jen-Lin Chao

Chen-Wei Hsu

Wei-Kuo Yen

Kuang-Chu Chen

Wei-Chuan Huang

Chiang-Chou Lo

Cheng-Hsi Wen

Chung-Lung Hsu

Chao-Hsien Lin

Cheng Tao Chen

Chun-Yao Chiu

A mask ROM fabrication method which comprises steps: sequentially forming a gate dielectric layer and a first photoresist layer on a substrate; letting a light having a wavelength of 365 nm pass through a first phase shift mask to photolithographically form on the first photoresist layer a plurality of first trenches having a width of 243-365 nm; doping the substrate to form a plurality of embedded bit lines having a width of 243-365 nm; removing the first photoresist layer; sequentially forming a polysilicon layer and a second photoresist layer on the gate dielectric layer; and letting the light pass through a second phase shift mask to photolithographically form a plurality of polysilicon word lines on the polysilicon layer. Thereby is reduced the line width of mask ROM to 243-365 nm and decreased the area of mask ROM.

Mask ROM fabrication method

A customer-orientated manufacturing planning and controlling system. An order management module is programmed to receive an order for a product and reserve a capacity for the order based on a capacity model that considers a plurality of capacity vectors in a production system. A plan engine generates a fixed production schedule for the order based on the capacity model. A priority management engine provides a priority for the order. A production schedule monitor and evaluation module determines whether the order in process conforms to the fixed production schedule by statistical process control (SPC) and whether to adjust the fixed production schedule and to adjust the priority based on a dynamic achievement model of historical fixed production schedules, based on historical production information in a production database storing production information of the production system.

System and method for manufacturing planning and control

A system and method for control factor management for a work-in-process (WIP) in a production system. A plan engine is programmed to receive an order for a product, reserve a capacity for the order based on a capacity model that considers a plurality of capacity vectors, and generate a plan for the WIP of the order according to a control factor. A control factor management module adjusts the control factor of the plan engine according to a current value of the control factor in the production system, a target value of the control factor, and a priority of the WIP. Preferably, a control factor matrix of the product is provided in the control factor management module as a function of the current value of the control factor in the production system, the target value of the control factor, the priority of the WIP, and a target date of the order.

System and method of control factor management

A system and method of coinsurance wafer management. The system includes at least one production line and an order management unit. The production line processes a MPW shuttle including original wafers and coinsurance wafers with a common fabrication process before metal layering, processes the original wafers with different metal layering fabrication processes according to a metal layering technology of each device design of the MPW shuttle, and withholds the coinsurance wafers without further fabrication. The order management unit receives a request for a designated device design before a cutoff date, and the production line releases and processes coinsurance wafers with the metal layering fabrication process corresponding to the designated device design when the request is received.

System and method of coinsurance wafer management

A system for planning and controlling a pull-in request of an order with demanded capacity in a production system. A plan engine is programmed to receive a pull-in request for the order, release original demanded capacity, reserve a capacity for the pull-in order, and generate a fixed production schedule for the pull-in order based on a capacity model that considers a plurality of capacity vectors in the production system. A production schedule monitor and evaluation module determines whether the relevant current pull-in order conforms to the fixed production schedule and whether to adjust the fixed production schedule when the relevant current pull-in order deviates from the fixed production schedule.

System and method for pull-in order planning and control

Growing community of inventors

Hsinchu, Taiwan

Chin-Yung Chang