Taiwan Semiconductor Manufacturing Comp. Ltd.

Chin-Ti Ko

Heng-Hsin Liu

Jong-I Mou

Chun-Hsien Lin

Fei-Gwo Tsai

Kuo-Hung Chao

Liu Bo-Tsun

Wu Cheng-Hung

Peng Jui-Chun

Among other things, systems and techniques are provided for detecting defects on a wafer based upon non-correctable error data yielded from a scan of the wafer to determine a topology of the wafer. The non-correctable error data is reconstructed to generate a non-correctable error image map, which is transformed to generate a projection. In some embodiments, the non-correctable error image map is transformed via a feature extraction transform such as a Hough transform or a Radon transform. In some embodiments, the projection is compared to a set of rules to identify a signature in the non-correctable error image map indicative of a defect.

Detection of defects on wafer during semiconductor fabrication

Growing community of inventors

Zhudong, Taiwan

Chin-Ti Ko