Taiwan Semiconductor Manufacturing Comp. Ltd.

Chien Lin Liu

Wei-Cheng Wu

Wen-Tuo Huang

Harry-Hak-Lay Chuang

Chung-Jen Huang

Wei Chuang Wu

Chia-Sheng Lin

Shih Kuang Yang

Ping-Tzu Chen

Shun-Kuan Lin

Yung Chun Tu

Various embodiments of the present disclosure are directed towards a shared frontside pad/bridge layout for a three-dimensional (3D) integrated circuit (IC), as well as the 3D IC and a method for forming the 3D IC. A second IC die underlies the first IC die, and a third IC die underlies the second IC die. A first-die backside pad, a second-die backside pad, and a third die backside pad are in a row extending in a dimension and overlie the first, second, and third IC dies. Further, the first-die, second-die, and third-die backside pads are electrically coupled respectively to individual semiconductor devices of the first, second, and third IC dies. The second and third IC dies include individual pad/bridge structures at top metal (TM) layers of corresponding interconnect structures. The pad/bridge structures share the shared frontside pad/bridge layout and provide lateral routing in the dimension for the aforementioned electrical coupling.

Shared pad/bridge layout for a 3D IC

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Kaohsiung, Taiwan

Chien Lin Liu