Taiwan Semiconductor Manufacturing Comp. Ltd.

Chien-Chih Liao

Chin-Hsiang Lin

Jong-I Mou

Tseng Chin Lo

Jui-Long Chen

Hui-yun Chao

Ta-Yung Lee

A system and method for aligning a probe, such as a wafer-level test probe, with wafer contacts is disclosed. An exemplary method includes receiving a wafer containing a plurality of alignment contacts and a probe card containing a plurality of probe points at a wafer test system. A historical offset correction is received. Based on the historical offset correct, an orientation value for the probe card relative to the wafer is determined. The probe card is aligned to the wafer using the orientation value in an attempt to bring a first probe point into contact with a first alignment contact. The connectivity of the first probe point and the first alignment contact is evaluated. An electrical test of the wafer is performed utilizing the aligned probe card, and the historical offset correction is updated based on the orientation value.

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Miao-Li, Taiwan

Chien-Chih Liao