Taiwan Semiconductor Manufacturing Comp. Ltd.

Other

Chia-Ling Yeh

Ching Yu Chen

Chun Lin Tsai

Jiun-Lei Jerry Yu

Po-Chih Chen

Yun-Hsiang Wang

Jiang-He Xie

Kuei-Ming Chen

Man-Ho Kwan

Yi-Chuan Lo

Ming-Tsung Chen

Ching-Yu Chen

Yu-Shine Lin

Pravanshu Mohanta

Various embodiments of the present disclosure are directed toward an integrated chip including an undoped layer overlying a substrate. A first barrier layer overlies the undoped layer. A doped layer overlies the first barrier layer. Further, a second barrier layer overlies the first barrier layer, where the second barrier layer is laterally offset from a perimeter of the doped layer by a non-zero distance. The first and second barrier layers comprise a same III-V semiconductor material. A first atomic percentage of a first element within the first barrier layer is less than a second atomic percentage of the first element within the second barrier layer.

Barrier structure configured to increase performance of III-V devices

Disclosed is a semiconductor device and a method for fabricating such semiconductor device, specifically a High Electron Mobility Transistor (HEMT) with a back barrier layer for blocking electron leakage and improve threshold voltage. In one embodiment, a semiconductor device, includes: a Gallium Nitride (GaN) layer; a front barrier layer over the GaN layer; a source electrode, a drain electrode and a gate electrode formed over the front barrier layer; a 2-Dimensional Electron Gas (2-DEG) in the GaN layer at a first interface between the GaN layer and the front barrier layer; and a back barrier layer in the GaN layer, wherein the back barrier layer comprises Aluminum Nitride (AlN).

High Electron Mobility Transistor (HEMT) with a back barrier layer

Strain relief trenches may be formed in a substrate prior to growth of an epitaxial layer on the substrate. The trenches may reduce the stresses and strains on the epitaxial layer that occur during the epitaxial growth process due to differences in material properties (e.g., lattice mismatches, differences in thermal expansion coefficients, and/or the like) between the epitaxial layer material and the substrate material. The stress and strain relief provided by the trenches may reduce or eliminate cracks and/or other types of defects in the epitaxial layer and the substrate, may reduce and/or eliminate bowing and warping of the substrate, may reduce breakage of the substrate, and/or the like. This may increase the center-to-edge quality of the epitaxial layer, may permit epitaxial layers to be grown on larger substrates, and/or the like.

Strain relief trenches for epitaxial growth

A high electron mobility transistor (HEMT) device and a method of forming the same are provided. The method includes forming a first III-V compound layer over a substrate. A second III-V compound layer is formed over the first III-V compound layer. The second III-V compound layer has a greater band gap than the first III-V compound layer. A third III-V compound layer is formed over the second III-V compound layer. The third III-V compound layer and the first III-V compound layer comprise a same III-V compound. A passivation layer is formed along a topmost surface and sidewalls of the third III-V compound layer. A fourth III-V compound layer is formed over the second III-V compound layer. The fourth III-V compound layer has a greater band gap than the first III-V compound layer.

High electron mobility transistor (HEMT) device and method of forming same

An enhancement mode field-effect transistor (E-FET) for high static performance is provided. A composite barrier layer comprises a lower barrier layer and an upper barrier layer. The upper barrier layer is arranged over the lower barrier layer and has a different polarization than the lower barrier layer. Further, the composite barrier layer comprises a gate opening. A channel layer is arranged under the composite barrier layer, such that a heterojunction is defined at an interface between the channel layer and the composite barrier layer. A gate dielectric layer is arranged over the composite barrier layer and within the gate opening. A gate electrode is arranged over the gate dielectric layer. A method for manufacturing the E-FET is also provided.

Enhancement mode field-effect transistor with a gate dielectric layer recessed on a composite barrier layer for high static performance

An earpiece apparatus for in-ear headphones, includes two shells, each having a speaker and an extending sound output hole, wherein at least one mounting hole is positioned on the outer surface of said shells, said mounting hole is not positioned opposite to said sound output hole, a vibrating structure is correspondingly positioned on said mounting hole, said vibrating structure contacts the earlap, said vibrating structure comprises a vibrating diaphragm and a flexible piece, said vibrating diaphragm is fixed on said flexible piece, said vibrating diaphragm is made of thin metal, plastic, or paper etc. membrane material, and said flexible piece is made of a soft material, and when the sound waves produced from said speaker vibrate within said shell, said flexible piece and said vibrating diaphragm vibrate accordingly along with the sound waves passing through.

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Jhubei, Taiwan

Chia-Ling Yeh