Taiwan Semiconductor Manufacturing Comp. Ltd.

Cheng Yen-Wei

Jong-I Mou

Yen-Di Tsen

Keung Hui

One or more methods or systems for performing chemical mechanical planarization (CMP) are provided. The system includes at least one of an emitter, a detector, a spectroscopic signal generator, a comparator, a spectral library, a controller or a CMP device. A spectroscopic signal is generated and is used to determine the thickness of a first material formed on or from a wafer by comparing the spectroscopic signal to a spectral library. Responsive to the thickness not being equal to the desired thickness, the controller instructs the CMP device to perform a rotation to reduce the thickness of the first material. The system and method herein increase the sensitivity of the CMP, such that the thickness of the first material is reduced with greater accuracy and precision, as compared to where the thickness is not measured between consecutive rotations of a wafer.

Method and/or system for chemical mechanical planarization (CMP)

Among other things, one or more systems and techniques for retuning a semiconductor fabrication component are provided. The semiconductor fabrication component, such as an advanced process control (APC) component, is configured to evaluate or adjust various fabrication parameters associated with semiconductor fabrication processing. Processing data associated with the semiconductor fabrication component is evaluated to formulate performance indices used to evaluate performance of parameters used by the semiconductor fabrication component. One or more fabrication process change simulations are performed to generate a component operating behavior data structure indicating how different values for the parameters result in improved or degraded performance by the semiconductor fabrication component. In this way, the component operating behavior data structure is evaluated to identify tuning values for the parameters that are used to retune the semiconductor fabrication component.

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Hsinchu, Taiwan

Cheng Yen-Wei