Taiwan Semiconductor Manufacturing Comp. Ltd.

Cheng-Ting Tseng

Chih-Wei Chang

Fa-Yuan Chang

Shih-Fang Chen

Cheng-Cheng Chang

Chin-Chang Chen

A wafer transfer system having a temperature control apparatus. The temperature control apparatus is constructed and arranged so that a material, element, or atomic particle may flow therethrough to heat or cool a wafer carried by the wafer transfer system. The material, element or atomic particle flowing through the temperature control apparatus causes heat to be pumped to or from an upper surface or lower surface. Preferably the temperature control apparatus is a thermoelectric device. Preferably the thermoelectric device includes a plurality of alternating N-type and P-type semiconductor pellets arranged electrically in series and thermally in parallel, and connected to a DC power supply. A switch or relay is provided for altering the direction of current flow to the thermoelectric device from a DC supply.

Growing community of inventors

Hsin-Chu, Taiwan

Cheng-Ting Tseng