Taiwan Semiconductor Manufacturing Comp. Ltd.

Cheng-Ming Lee

Mei-Yun Wang

Fu-Kai Yang

Chia-Hsien Yao

Ting Fang

Chung-Hao Cai

Yen-Jun Huang

Semiconductor structures and methods are provided. A semiconductor structure according to the present disclosure includes a first fin structure and a second fin structure over a substrate, a first source/drain feature disposed over the first fin structure and a second source/drain feature disposed over the second fin structure, a dielectric feature disposed over the first source/drain feature, and a contact structure formed over the first source/drain feature and the second source/drain feature. The contact structure is electrically coupled to the second source/drain feature and is separated from the first source/drain feature by the dielectric feature.

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Taoyuan County, Taiwan

Cheng-Ming Lee