Taiwan Semiconductor Manufacturing Comp. Ltd.

Chen-Ning Fuh

Yi-Hung Chen

Chi-Shen Lo

Pey-Yuan Lee

Wen-Chung Lee

Hong-Ji Yang

A method for calibrating a linewidth measurement tool and a system for calibrating the linewidth measurement tool each employ a correction of a series of periodic actual measurements of at least one single measurement location of a topographic feature within a linewidth standard with an exponentially weighted moving average of a series of deviations of the series of periodic actual measurements from a corresponding series of regressed data points derived from mathematical regression of the series of periodic actual measurements. Such a correction provides for a more accurate calibration of the linewidth measurement tool and a more accurate measurement of linewidths within microelectronic products while employing the calibrated linewidth measurement tool.

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Taipei, Taiwan

Chen-Ning Fuh