Maxchip Electronics Corp.

United Microelectronics Corp.

Chen-Chiu Hsu

Tung-Ming Lai

Kai-An Hsueh

Ming-De Huang

Sun-Chieh Chien

Chun-Yen Chang

Chung-Yuan Lee

A method of forming a semiconductor structure is provided. A substrate having a cell area and a periphery area is provided. A stacked structure including a gate oxide layer, a floating gate and a first spacer is formed on the substrate in the cell area and a resistor is formed on the substrate in the periphery area. At least two doped regions are formed in the substrate beside the stacked structure. A dielectric material layer and a conductive material layer are sequentially formed on the substrate. A patterned photoresist layer is formed on the substrate to cover the stacked structure and a portion of the resistor. The dielectric material layer and the conductive material layer not covered by the patterned photoresist layer are removed, so as to form an inter-gate dielectric layer and a control gate on the stacked structure, and simultaneously form a salicide block layer on the resistor.

Method of forming semiconductor structure

Semiconductor structure

A method of forming a semiconductor structure is provided. A substrate having a cell area and a periphery area is provided. An oxide material layer and a first conductive material layer are sequentially formed on the substrate in the cell and periphery areas. A patterning step is performed to form first and second stacked structures on the substrate respectively in the cell and periphery areas. First and second spacers are formed respectively on sidewalls of the first and second stacked structures. At least two first doped regions are formed in the substrate beside the first stacked structure, and two second doped regions are formed in the substrate beside the second stacked structure. A dielectric layer and a second conductive layer are formed at least on the first stacked structure. The first stacked structure, the dielectric layer, and the second conductive layer in the cell area constitute a charge storage structure.

A triple-well structure for semiconductor IC devices such as an SRAM IC device and a process for its fabrication, that allows for improved data storage stability as well as improved immunity capability against interference from device I/O bouncing and alpha particles. The triple-well structure includes at least one P-well in a P-type substrate, a number of N-wells, and a retrograde P-well formed within one of the N-wells. The process for fabricating the triple-well structure includes first implanting boron ions in the P-type substrate. A photomask is subsequently formed for the implantation of phosphorous ions in the region where a P-type MOS transistor is to be fabricated. A high temperature drive-in procedure is then employed to form a P-well and a number of N-wells. A selected area of one of the N-wells where an N-type MOS transistor is defined is then subjected to boron ion implantation, which is followed by an annealing procedure to form the retrograde P-well.

Process for fabricating a triple-well structure for semiconductor

Growing community of inventors

Hsinchu, Taiwan

Chen-Chiu Hsu