Average Co-Inventor Count = 3.99
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Applied Materials, Inc. (15 from 13,684 patents)
15 patents:
1. 12009236 - Sensors and system for in-situ edge ring erosion monitor
2. 11955318 - Ash rate recovery method in plasma strip chamber
3. 11488812 - Method and apparatus for reducing particle defects in plasma etch chambers
4. D931240 - Substrate support pedestal
5. 11094511 - Processing chamber with substrate edge enhancement processing
6. 11088000 - Wafer based corrosion and time dependent chemical effects
7. 10658161 - Method and apparatus for reducing particle defects in plasma etch chambers
8. 10515862 - Wafer based corrosion and time dependent chemical effects
9. 10217627 - Methods of non-destructive post tungsten etch residue removal
10. 9885567 - Substrate placement detection in semiconductor equipment using thermal response characteristics
11. 9155184 - Plasma generation source employing dielectric conduit assemblies having removable interfaces and related assemblies and methods
12. 8771423 - Low sloped edge ring for plasma processing chamber
13. 8287650 - Low sloped edge ring for plasma processing chamber
14. 8101025 - Method for controlling corrosion of a substrate
15. 7807579 - Hydrogen ashing enhanced with water vapor and diluent gas