Taiwan Semiconductor Manufacturing Comp. Ltd.

Chang-Jen Hsieh

Hung-Cheng Sung

Chen-Ming Huang

Wen-Ting Chu

Chung-Yi Yu

Ya-Chen Kao

Chi-Hsin Lo

Chia-Shiung Tsai

Shih-Chang Liu

Harry-Hak-Lay Chuang

Hung Cho Wang

Chun-Heng Liao

Yeur-Luen Tu

Feng-Jia Shiu

Yi-Shin Chu

Jen-Sheng Yang

Te-Hsun Hsu

Shih Wei Wang

Derek Lin

A memory cell with dual sidewall spacers and its manufacturing methods are provided. In some embodiments, the memory cell includes a bottom electrode disposed over a substrate, a resistance switching dielectric disposed over the bottom electrode and having a variable resistance, and a top electrode disposed over the resistance switching dielectric. The memory cell further includes a first sidewall spacer disposed on an upper surface of the bottom electrode and extending upwardly alongside the resistance switching dielectric and the top electrode. The memory cell further includes a second sidewall spacer having a bottom surface disposed on the upper surface of the bottom electrode and directly and conformally lining the first sidewall spacer.

Via landing enhancement for memory device

A memory cell with dual sidewall spacers and its manufacturing methods are provided. In some embodiments, a multi-layer stack is formed and patterned to form a hard mask, a top electrode and a resistance switching dielectric. Then, a first dielectric spacer layer is formed over the bottom electrode layer, extending alongside the resistance switching dielectric, the top electrode, and the hard mask, and further extending over the hard mask. Then, a second dielectric spacer layer is formed directly on and conformally lining the first dielectric spacer layer. The first dielectric spacer layer is deposited at a first temperature and the second dielectric spacer layer is deposited at a second temperature higher than that of the first temperature.

A method for forming a semiconductor structure includes providing a substrate; forming a gate stack of a flash memory cell, wherein a top portion of the gate stack comprises a capping layer; forming a gate having at least a portion over the capping layer; and reducing a thickness of the portion of the gate over the capping layer. The topography height difference between the flash memory cell and MOS devices on the same chip is reduced.

Method for reducing topography of non-volatile memory and resulting memory cells

A split gate memory cell. A floating gate is disposed on and insulated from a substrate comprising an active area separated by a pair of isolation structures formed therein. The floating gate is disposed between the pair of isolation structures and does not overlap the upper surface thereof. A cap layer is disposed on the floating gate. A control gate is disposed over the sidewall of the floating gate and insulated therefrom, partially extending to the upper surface of the cap layer. A source region is formed in the substrate near one side of the floating gate.

Flash memory cell with split gate structure and method for forming the same

Split-gate memory cells and fabrication methods thereof. A split-gate memory cell comprises a plurality of isolation regions formed on a semiconductor substrate along a first direction, between two adjacent isolation regions defining an active region having a pair of drains and a source region. A top level of the active regions is lower than a top level of the isolation regions. A pair of floating gates is disposed on the active regions and aligned with the isolation regions, wherein a passivation layer is disposed on the floating gate to prevent thinning from CMP. A pair of control gates is self-aligned with the floating gates and disposed on the floating gates along a second direction. A source line is disposed between the pair of control gates along the second direction. A pair of select gates is disposed on the outer sidewalls of the pair of control gates along the second direction.

Split-gate memory cells and fabrication methods thereof

Split-gate memory cells and fabrication methods thereof. A split-gate memory cell comprises a plurality of isolation regions formed on a semiconductor substrate along a first direction, between two adjacent isolation regions defining an active region having a pair of drains and a source region. A pair of floating gates are disposed on the active regions and self-aligned with the isolation regions, wherein a top level of the floating gate is equal to a top level of the isolation regions. A pair of control gates are self-aligned with the floating gates and disposed on the floating gates along a second direction. A source line is disposed between the pair of control gates along the second direction. A pair of select gates are disposed on the outer sidewalls of the pair of control gates along the second direction.

A new method to form a floating gate isolation test structure in the manufacture of a memory device is achieved. The method comprises providing a substrate. A gate oxide layer is formed overlying the substrate. A floating gate conductor layer is deposited overlying the gate oxide layer. The floating gate conductor layer is patterned to expose the substrate for planned source regions. Ions are implanted into the exposed substrate to form the source regions. Contacting structures are formed to the source regions. Contacting structures are formed to the floating gate conductor layer.

Growing community of inventors

Hsinchu, Taiwan

Chang-Jen Hsieh