University-Industry Cooperation Group of Kyung Hee University

Chan Wook Jang

Won Jun Lee

Suk Ho Choi

Disclosed is a method of fabricating a Janus transition metal dichalcogenide thin film. More particularly, the method includes a first step of depositing a transition metal dichalcogenide thin film including a first chalcogen element on an oxide silicon substrate; a second step of a vacancy forming in the transition metal dichalcogenide thin film; and a third step of substituting the first chalcogen element with a second chalcogen element to form a Janus transition metal dichalcogenide thin film. The first step, the second step, and the third step may be performed in a single CVD process in a same reaction chamber. Therefore, the present disclosure can shorten the processing time of a Janus transition metal dichalcogenide thin film and can reduce the manufacturing cost thereof. In addition, the present disclosure can minimize damage to the Janus transition metal dichalcogenide thin film during the fabrication process, thereby being capable of a high-quality single-crystal Janus transition metal dichalcogenide thin film.

Growing community of inventors

Yongin-si, South Korea

Chan Wook Jang