Average Co-Inventor Count = 2.85
ph-index = 6
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (15 from 10,346 patents)
15 patents:
1. 8293067 - Microwave plasma processing device and gate valve for microwave plasma processing device
2. 8267040 - Plasma processing apparatus and plasma processing method
3. 7993488 - Microwave plasma processing device and gate valve for microwave plasma processing device
4. D594485 - Top panel for microwave introduction window of a plasma processing apparatus
5. D593585 - Top panel for microwave introduction window of a plasma processing apparatus
6. D589034 - Microwave introducing antenna for a plasma processing apparatus
7. D572707 - Microwave introducing antenna for a plasma processing apparatus
8. D572733 - Top panel for microwave introduction window of a plasma processing apparatus
9. D571831 - Top panel for microwave introduction window of a plasma processing apparatus
10. D571832 - Top panel for microwave introduction window of a plasma processing apparatus
11. D571833 - Top panel for microwave introduction window of plasma processing apparatus
12. D571383 - Top panel for microwave introduction window of a plasma processing apparatus
13. D563949 - Microwave introducing antenna for a plasma processing apparatus
14. D563951 - Microwave introducing antenna for a plasma processing apparatus
15. D563950 - Microwave introducing antenna for a plasma processing apparatus