Average Co-Inventor Count = 3.43
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Cmc Materials, Inc. (2 from 33 patents)
2 patents:
1. 12398293 - Composition and method for polishing boron doped polysilicon
2. 12269969 - Polishing composition and method with high selectivity for silicon nitride and polysilicon over silicon oxide