Novellus Systems Incorporated

Brian Evans

Bryan L Buckalew

Robert Rash

Seshasayee Varadarajan

Shantinath Ghongadi

Kousik Ganesan

Tariq Majid

Jeff Hawkins

Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.

Rapidly cleanable electroplating cup seal

Rapidly cleanable electroplating cup assembly

Growing community of inventors

Elmira, OR, United States of America

Brian Evans