Asml Netherlands B.v.

Brandon Michael Johnson

Theodorus Wilhelmus Driessen

Benjamin Sams

Dietmar Uwe Herbert Trees

Edwin Johan Buis

Vikas Giridhar Telkar

Herman Harry Borggreve

A droplet generator nozzle () includes a metal body (), a metal fitting () arranged adjacent to the metal body, and a capillary () comprising a first end and a second end. The first end of the capillary is disposed within the metal fitting, and the capillary is configured to eject initial droplets of a material from the second end of the capillary. The droplet generator nozzle further includes an electromechanical element () disposed within the metal body and coupled to the first end of the capillary and a fastener element () configured to clamp around a portion of the metal body and around the metal fitting. The electromechanical element is configured to apply a change that affects droplet generation from the capillary. The second end of the capillary protrudes out from an opening in the fastener element of the droplet generator nozzle. Droplet generator nozzleof FIG.C represents the embodiment shown in FIG.B, in a cross section orthogonal to the cross section shown in FIG.B.

Hybrid droplet generator for extreme ultraviolet light sources in lithographic radiation systems

A method of manufacturing a nozzle for a droplet generator for a laser-produced plasma radiation source is disclosed. The method comprises disposing a glass capillary in a throughbore of a metal fitting, heating the metal fitting; and applying a pressure to the glass capillary such that the glass capillary conforms to the shape of, and forms a direct glass-to-metal seal with, the throughbore. Also disclosed is a nozzle for a droplet generator for a laser-produced plasma radiation source, and the radiation source itself, wherein the nozzle comprises the glass capillary for emitting fuel as droplets and the metal fitting for coupling the glass capillary to a body of the droplet generator, the glass capillary being conformed to a shape of a throughbore of the metal fitting, and wherein the glass capillary forms a direct glass-to-metal seal with the throughbore.

Droplet generator nozzle

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Escondido, CA, United States of America

Brandon Michael Johnson