Osmic, Inc.

Rigaku Corporation

Rigaku Innovative Technologies, Inc.

Boris Verman

Licai Jiang

Kazuhiko Omote

Yuriy Platonov

Tetsuya Ozawa

George A Gutman

Jimpei Harada

Takeshi Osakabe

Makoto Kambe

Karsten Joensen

Hideaki Takahashi

Kiyoshi Ogata

Yoshiyasu Ito

Srivatsan Seshadri

Masahiro Nonoguchi

Hiroshi Motono

Ryuji Matsuo

Yoshio Iwasaki

Sei Yoshihara

Shigematsu Asano

Katsutaka Horada

Shiro Umegaki

Bonglea Kim

Tsutomu Tada

Ryotaro Yamaguchi

Akifusa Higuchi

Takao Kinefuchi

Hajime Fujimura

Michael Young

Srivatsan Seshardi

Toshifumi Higuchi

Provided is a total reflection X-ray fluorescence spectrometer which has high analysis sensitivity and analysis speed. The total reflection X-ray fluorescence spectrometer includes: an X-ray source that has an electron beam focal point having an effective width in a direction parallel to a surface of a sample, and orthogonal to an X-ray irradiation direction, that is larger than a dimension in the irradiation direction; a reflective optic that has an effective width in the orthogonal direction that is larger than that of the electron beam focal point, and has a curved surface in the irradiation direction; and a plurality of detectors that are arranged in a row in the orthogonal direction, and are configured to measure intensities of fluorescent X-rays emitted from the sample irradiated with primary X-rays focused by the reflective optic.

Total reflection x-ray fluorescence spectrometer

In an X-ray inspection device according to the present invention, an X-ray irradiation unitincludes a first X-ray optical elementfor focusing characteristic X-rays in a vertical direction, and a second X-ray optical elementfor focusing the characteristic X-rays in a horizontal direction. The first X-ray optical elementis constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.

X-ray inspecting device, X-ray thin film inspecting method, and method for measuring rocking curve

An X-ray generator includes: a line X-ray source; a multilayer film mirror; and a side-by-side reflecting mirror including two concave mirrors joined together so as to share a join line. A cross section of a reflecting surface of the multilayer film mirror has a parabolic shape, and a focus of the parabolic shape is located at the line X-ray source. Cross sections of reflecting surfaces of the two concave mirrors of the side-by-side reflecting mirror each have a parabolic shape, and each of focuses of the parabolic shapes is located on a side opposite to the multilayer film mirror. An extended line of the join line of the side-by-side reflecting mirror passes through the multilayer film mirror and the line X-ray source as viewed in a plan view.

X-ray generator and x-ray analysis device

Only X-rays having a specific wavelength, selected from a group of focusing X-rays diffracted from a sample, are reflected from a monochromator based on a Bragg's condition, passed through a receiving slit and detected by an X-ray detector. The monochromator is configured to be freely removable, and arranged between the sample and a focal point at which the wavelength-selected focusing X-rays diffracted from the sample are directly focused. At this time, the monochromator is moved so as to position the monochromator as close to the focal point as possible. The monochromator comprises a multilayer mirror having an internal interplanar spacing, wherein said internal interplanar spacing varies continuously from one end of the monochromator to the other end.

X-ray diffractometer with multilayer reflection-type monochromator

An X-ray apparatus that creates a virtual source having a narrow energy bandwidth and enables a high-resolution X-ray diffraction measurement; a method of using the same; and an X-ray irradiation method are provided. An X-ray apparatusincludes a monochromatorthat focuses a divergent X-ray beam while dispersing it and a selection partthat is installed in a condensing position of the condensed X-ray beam for selecting an X-ray beam having a wavelength in a specific range, allowing it to pass through, and creating a virtual source. With this arrangement, it is possible to create a virtual source having a narrow energy bandwidth at a focal pointand by means of the virtual source a high-resolution X-ray diffraction measurement is available. By using the X-ray apparatus, it is possible to sufficiently separate an X-ray beam having such an extremely narrow energy bandwidth as, for example, K&#x3b1;1 ray from K&#x3b1;2 ray. In addition, it is also possible to cut out part of continuous X-ray beams to create a virtual source.

X-ray apparatus, method of using the same and X-ray irradiation method

A system for analyzing a sample is provided. The system includes an optical system capable of providing a one-dimensional beam and a two-dimensional beam. The system may include a beam selection device to select between providing a one-dimensional x-ray beam to the sample in a one-dimensional operation mode and a two-dimensional x-ray beam to the sample in a two-dimensional operation mode.

X-ray beam system offering 1D and 2D beams

A X-ray scattering measurement device and measurement method can measure, with high resolution, the intensity of X-rays which have undergone small-angle scattering and diffraction with reflection geometry and can easily and accurately measure a microstructure on the surface of a sample. The X-ray scattering measurement device is suitable for microstructural measurement on the surface of a sample includes an X-ray source that generates an X-ray; a first mirror and a second mirror that continuously reflect the generated X-ray; a sample stage that supports the sample; and a two-dimensional detector that detects the X-ray scattered on the surface of the sample. The first mirror focuses the generated X-ray onto the two-dimensional detector within a plane parallel to the surface of the sample, and the second mirror focuses the X-ray reflected by the first mirror onto the surface of the sample within a plane perpendicular to the surface of the sample.

X-ray scattering measurement device and X-ray scattering measurement method

A nanotube based device for guiding a beam of x-rays, photons, or neutrons, includes a beam source and at least one nanotube. Each nanotube has an optical entrance positioned in a manner that a projection of the direction of the central axis at the optical entrance intersects with the beam source. Each nanotube may have an interior diameter that varies along the length of the nanotube. to point the entrances of a bundle of nanotubes toward a point-shaped beam source, the bundle can be grown as an array of multilayer nanotubes from a spherical growth plate. The clear aperture of the bundle is enhanced by providing a smaller number of wall layers of each nanotube near the growth plate than at a distance from the growth plate.

Nanotube based device for guiding X-ray photons and neutrons

An x-ray optical system includes a multiple corner optic assembly including an adjustable aperture assembly located in close proximity to the optic assembly. The adjustable aperture assembly enables a user to easily and effectively adjust the convergence of an incident beam of x-rays or the optic focal spot size. The adjustable aperture assembly may further enable a user to condition x-rays of one wavelength and block x-rays of another wavelength and thereby reduce the amount of background radiation exhibited from x-rays of more than one wavelength.

X-ray optical systems with adjustable convergence and focal spot size

An x-ray optical system includes an x-ray source which emits x-rays, a first optical element which conditions the x-rays to form two beams and at least a second optical element which further conditions at least one of the two beams from the first optical element.

Multiconfiguration X-ray optical system

A multi-beam x-ray system includes an x-ray source which emits x-rays and a housing with a first part and a second part. The second part is moveable relative to the first part and includes a plurality of optics of different performance characteristics. Each optic, through the movement of the second part relative to the first part, is positioned to a working position so that the optic receives the x-rays from the x-ray source and directs the x-rays with the desired performance attributes to a desired location.

Multi-beam X-ray system

An x-ray generating system includes a source of x-ray radiation, a waveguide bundle optic for collimating the x-ray radiation produced by the source, a focusing optic for focusing the collimated x-ray radiation to a focal point.

X-ray generator with polycapillary optic

An x-ray beam conditioning system with a first diffractive element and a second diffractive element. The two diffractive elements are arranged in a sequential configuration, and one of the diffractive elements is a crystal. The other diffractive element may be a multilayer optic.

Beam conditioning system with sequential optic

An x-ray optical device includes an optic and an adjustable aperture that selectively occludes a portion of an x-ray beam. The adjustable aperture may be positioned between the optic and a sample and may be integrated with the optic or located in close proximity to the optic. The adjustable aperture enables a user to easily and effectively adjust the convergence of the x-rays. In doing so, the flux and resolution of the x-ray optical device can be optimized by using an optic having the maximum convergence allowed for all potential measurements, and then selecting a convergence for a particular measurement by adjusting the aperture.

X-ray optical system with adjustable convergence

The present invention provides an x-ray beam conditioning system with a Kirkpatrick-Baez diffractive optic including two optical elements, of which one of the optical elements is a crystal. The elements are arranged in a side-by-side configuration. The crystal can be a perfect crystal. One or both diffractive elements can be mosaic crystals. One element can be a multilayer optic. For example, the multilayer optic can be an elliptical mirror or a parabolic mirror with graded d-spacing. The graded d-spacing can be either lateral grading or depth grading, or both.

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Bloomfield, MI, United States of America

Boris Verman