Applied Materials, Inc.

Bopanna Vasanth

Kadthala Ramaya Narendrnath

Ashish Bhatnagar

Govinda Raj

Robert Hirahara

Daniel Martin

Prashanth Rao

An apparatus for a substrate support heater and associated chamber components having reduced energy losses are provided. In one embodiment, a substrate support heater is provided. The substrate support heater includes a heater body having a first surface to receive a substrate and a second surface opposing the first surface, a heating element disposed in the heater body between the first surface and the second surface, and a thermal barrier disposed on the second surface of the heater body, wherein the thermal barrier comprises a first layer and a second layer disposed on the first layer.

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Bengaluru, India

Bopanna Vasanth