Texas Instruments Corporation

Boku Katsushi

John Anthony Rodriguez

Keith A Remack

John Lane Gertas

Nagata Toshiyuki

Ogata Yoshihiro

Miyai Yoichi

Niuya Takayuki

Yoshida Hiroyuki

A method () of identifying failing bits in a ferroelectric memory device including at least one ferroelectric capacitor includes () writing same state data to the first capacitor, and () baking the first capacitor for a first specified period of time at a first selected temperature. A same state read () is performed on the first capacitor after the baking. Based on the results from the same state read, it is determined whether an error occurred. The first specified period of time can be from 10 minutes to 2 hours and the first selected temperature can be in a range from 85&#xb0; C. to 150&#xb0; C. A repair can be performed () to corrected detected errors. A related method () can detect imprinted bits using a same state write (), followed by a relatively high temperature bake (), then a same state read (). An opposite state date write () is performed followed by a relatively low temperature bake (), and then an opposite state data read () to identify opposite state error or imprint.

Ferroelectric memory bake for screening and repairing bits

Ferroelectric memory brake for screening and repairing bits

A semiconductor storage device is disclosed herein. A semiconductor substrate 1 has a first conductive type. A first groove is provided in this semiconductor substrate 1. A second groove 20, which is deeper than the first groove, is provided so as to be stacked within the first groove. A MOS transistor which include first and second regions 22 and 23 is connected to an accumulating electrode 133. The accumulating electrode 133 is disposed in the second groove 20 and separated from it by an insulating film 124. An electrode 143 is provided on the accumulating electrode 133 and separated therefrom by a capacitor insulating film 135. The electrode 143 is buried in the first and second grooves.

Semiconductor device and method of manufacturing the same

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