Carl Zeiss Smt Gmbh

Fiberzone Networks Ltd.

Boaz Pnini

Rahav Cohen

Menachem Eizenshtat

Ze'ev Ganor

A mounting for a lithography system comprises: a mounted element; a mounting element; and fastening elements which together secure the mounted element relative to the mounting element in at least one degree of freedom. A spacing is provided between the mounted element and the mounting element in the direction of the at least one degree of freedom, and each fastening element exerts a force on the mounted element exclusively in the direction of the at least one degree of freedom.

Mounting for a lithography system, and lithography system

A method adjusts a first element of a lithography apparatus toward a second element of the lithography apparatus via a tunable spacer which is arranged between the first element and the second element. The method includes: determining an actual location of the first element; determining a nominal location of the first element; unloading the tunable spacer; adjusting a height of the tunable spacer to bring the first element from the actual location to the nominal location; and loading the tunable spacer.

Method for adusting a first element of a lithography apparatus towards a second element of a lithography apparatus by a tunable spacer

An actuator device for aligning an element includes at least one first actuator unit, which is secured to a support structure, for a first setting range and a second actuator unit, which is able to be secured to the element, for a second setting range. The second actuator unit is connected to an output element of the first actuator unit so that the positioning of the second actuator unit is adjustable by an adjustment of the output element. The first actuator unit has an adjusting element and a fixing element, which is able to be secured to the support structure. The fixing element secures the output element in a force-locking manner in an operating state of the element. The fixing element is furthermore configured to release the force-locking connection in a setting state of the element to enable an adjustment of the output element via the adjusting element.

Actuator device for aligning an element, projection exposure apparatus for semiconductor lithography, and method for aligning an element

An optical crossbar switch for optically coupling optic fibers comprising: at least one first fiber and a plurality of second fibers; a moveable fiber-end carriage coupled to an end of the at least one first fiber and having at least one latching hook and being constrained to move along a predetermined trajectory; at least one moveable slack-control carriage coupled to the body of the at least one first fiber and constrained to move along a predetermined trajectory; an array of sockets defined by walls, at least one of which walls of each sockets formed having a latch hole for receiving the latching hook; and at least one moving device controllable to move the carriages; wherein to optically couple a first fiber to a second fiber, the at least one moving device moves the fiber-end carriage of at least one of the first and second fibers to a socket and inserts the fiber's fiber end into the socket so that the at least one latching hook latches into the latch hole and secures the carriage to the socket array.

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Goeggingen, Germany

Boaz Pnini