Taiwan Semiconductor Manufacturing Comp. Ltd.

Bo-Chang Su

Yu-Lung Yeh

Chih-Ho Tai

Shih-Shiung Chen

Ming-Chi Wu

Chien Nan Tu

Chun-Chieh Fang

Yung-Hsiang Chen

Hsun-Ying Huang

Kun-Yu Lin

Kuan-Chi Tsai

Hsien-Liang Meng

Yen-Hsiu Chen

Jung-I Lin

Wei-Chih Weng

Ching-Hung Huang

Po-Jung Chiang

Wen-Tsao Chen

Cheng-Hsien Chen

Chi-Feng Chen

A method includes etching a semiconductor substrate to form a trench, filling a dielectric layer into the trench, with a void being formed in the trench and between opposite portions of the dielectric layer, etching the dielectric layer to reveal the void, forming a diffusion barrier layer on the dielectric layer, and forming a high-reflectivity metal layer on the diffusion barrier layer. The high-reflectivity metal layer has a portion extending into the trench. A remaining portion of the void is enclosed by the high-reflectivity metal layer.

Deep trench isolation structures resistant to cracking

A semiconductor device is provided. The semiconductor device includes a first deep trench isolation (DTI) structure within a substrate. The first DTI structure includes a barrier structure, a dielectric structure, and a copper structure. The dielectric structure is between the barrier structure and the copper structure. The barrier structure is between the substrate and the dielectric structure.

Semiconductor device including deep trench isolation structure comprising dielectric structure and copper structure and method of making the same

The semiconductor device includes a substrate, a bottom electrode, a capacitor dielectric layer, a top electrode, an etching stop layer, a first anti-reflective coating layer and a capping layer. The bottom electrode is on the substrate. The capacitor dielectric layer is on the bottom electrode. The capacitor dielectric layer has a first region and a second region adjacent to the first region. The top electrode is on the first region of the capacitor dielectric layer. The etching stop layer is on the top electrode. The first anti-reflective coating layer is on the etching stop layer, in which the first anti-reflective coating layer, the etching stop layer and the top electrode together have a sidewall. The capping layer overlies the sidewall, the etching stop layer, the second region of the capacitor dielectric layer, in which the capping layer is formed from oxide or nitride.

MIM capacitors for leakage current improvement

A system and method for blocking light from regions around a photodiode in a pixel of an image sensor is provided. In an embodiment a first optical block layer is formed on a first glue layer and a second glue layer is formed on the first optical block layer. The formation of the first optical block layer and the second glue layer is repeated one or more times to form multiple optical block layers and multiple glue layers. As such, if voids open up in the optical block layers during further processing, there is another optical block layer to block any light that may have penetrated through the void.

Image sensor device and method

Embodiments of mechanisms of a backside illuminated image sensor device structure are provided. The backside illuminated image sensor device structure includes a substrate having a frontside and a backside and a pixel array formed in the frontside of the substrate. The backside illuminated image sensor device structure further includes an antireflective layer formed over the backside of the substrate, and the antireflective layer is made of silicon carbide nitride.

Mechanisms for forming backside illuminated image sensor device structure

Growing community of inventors

Tainan, Taiwan

Bo-Chang Su