Nutool, Inc.

Other

Bernard M Frey

Douglas W Young

Bulent Mehmet Basol

Homayoun Talieh

Yuchun Wang

Efrain A Velazquez

Mark Henderson

The methods and systems described provide for an in-situ endpoint detection for material removal processes such as chemical mechanical processing (CMP) performed on a workpiece. In a preferred embodiment, an optical detection system is used to detect endpoint during the removal of planar conductive layers using CMP. An optically transparent polishing belt provides endpoint detection through any spot on the polishing belt. Once endpoint is detected, a signal can be used to terminate or alter a CMP process that has been previously initiated.

Chemical mechanical polishing endpoint detection

Described is a method and apparatus for producing bi-directional linear polishing that uses a flexible pad. In one aspect, a horizontal drive assembly moves a horizontal slide member that is horizontally moveable over rails attached to a single casting. Openings within the casting exist for the inclusion of the supply spool, the receive spool and the pad path rollers. A drive assembly translates the rotational movement of a motor into the horizontal bi-directional linear movement of the horizontal slide member. With the polishing pad properly locked in position, preferably being attached between a supply spool and the receive spool, horizontal bi-directional linear movement of the horizontal slide member creates a corresponding horizontal bi-directional linear movement of a portion of the polishing pad. Thus, the portion of the polishing pad disposed within a polishing area of the chemical mechanical polishing apparatus can polish a top front surface of a wafer using the bi-directional linear movement of the portion of the polishing pad.

Single drive system for a bi-directional linear chemical mechanical polishing apparatus

An impact release binding assembly for a snowboard which separates into two parts upon a sufficient impact subjected on the binding assembly regardless of the direction of the impact origin. The binding apparatus includes a boot plate coupled to the boot, and a latch assembly movable between a latched position and an unlatched position. In the latched position, the latch assembly releasably mounts the boot plate to the snowboard, while in the unlatched position, the latch assembly releases the boot plate from the snowboard. An inertia block is provided, having a selected mass, and formed to retain the latch assembly in the latched position until a sufficient inertial force dislodges the inertia block from supportive contact with the latch assembly. Upon being dislodged, the latch assembly is caused to move from a support position, supportably retaining the latch assembly in the latched position, to a release position, releasing the latch assembly to the unlatched position in the event of the sufficient inertial force. The latch assembly preferably includes a first latch mechanism and a second latch mechanism. The first latch mechanism is maintained in the latched position until a sufficient first inertial force of at least a predetermined amount and in a direction from about 0.degree. to about 180.degree. relative a plane extending through the latch assembly causes the first latch mechanism to move to the unlatched position. The second latch mechanism, in contrast, is maintained in the latched condition until a sufficient second inertial force of at least a predetermined amount and in a direction from about 180.degree. to about 360.degree. relative the plane extending through the latch assembly causes the second latch mechanism to move to the unlatched condition.

Impact releasable snowboard boot binding assembly and method

Growing community of inventors

Berkeley, CA, United States of America

Bernard M Frey