Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Taiwan Semiconductor Manufacturing Comp. Ltd. (1 from 40,982 patents)
1 patent:
1. 11454877 - Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof