Veeco Instruments Inc.

Ben Ohler

Doug Gotthard

Jens Struckmeier

A method of operating a probe based instrument includes a light source that generates and directs a beam of light towards a probe of the instrument to detect a property of probe deflection. The method automatically adjusts the position of the light beam on the probe based on movement of the probe by a Z actuator so as to eliminate apparent parasitic deflection of the probe. A light source assembly for detecting deflection of a probe preferably includes a base, a tip/tilt stage mounted on the base and a light source supported by the tip/tilt stage. The tip/tilt stage includes at least one electrically actuated fine adjustment actuator that controls the tip/tilt stage, preferably independently of movement of the AFM scanner used to move the probe.

Optical detection alignment/tracking method and apparatus

A force scanning probe microscope (FSPM) and associated method of making force measurements on a sample includes a piezoelectric scanner having a surface that supports the sample so as to move the sample in three orthogonal directions. The FSPM also includes a displacement sensor that measures movement of the sample in a direction orthogonal to the surface and generates a corresponding position signal so as to provide closed loop position feedback. In addition, a probe is fixed relative to the piezoelectric scanner, while a deflection detection apparatus is employed to sense a deflection of the probe. The FSPM also includes a controller that generates a scanner drive signal based on the position signal, and is adapted to operate according to a user-defined input that can change a force curve measurement parameter during data acquisition.

Method of making a force curve measurement on a sample

Force scanning probe microscope

A probe microscope includes a probe and a scanner, the scanner generating relative motion between a probe and a sample. In addition, a manual input device is provided to control a separation between a sample and a probe. The detector is used to generate a signal related to movement of the probe (for example, deflection). Moreover, the microscope has an alerting device that is responsive to the signal to provide feedback to an operator, the feedback being indicative of interaction between the sample and the probe. Preferably, the manual input device is a rotatable knob. Also, the alerting device is preferably a mechanical resistance device coupled to the knob to provide the feedback to the user.

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Santa Barbara, CA, United States of America

Ben Ohler