Average Co-Inventor Count = 4.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl-zeiss-smt Ag (2 from 461 patents)
2 patents:
1. 7462842 - Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements
2. 7060993 - Device, EUV-lithographic device and method for preventing and cleaning contamination on optical elements