Toppan Photomasks, Inc.

Bart A Wiles

Kevin L Griffin

Jennifer M Shepler

Ethan M Frye

Peter A Hendrickson

A system and method for automatically mounting a pellicle assembly on a photomask are disclosed. The method includes loading a photomask into a mounting apparatus and loading a pellicle assembly into a back plate of the mounting apparatus opposite the photomask. The back plate includes at least one load cell that measures a force applied by the mounting apparatus to the photomask and the pellicle assembly. The measured force associated with the at least one load cell is received and the pellicle assembly is mounted on the photomask to create a photomask assembly if the measured force is greater than or approximately equal to a minimum force.

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Kokomo, IN, United States of America

Bart A Wiles