Average Co-Inventor Count = 3.16
ph-index = 11
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Micron Technology Incorporated (30 from 37,972 patents)
2. Lam Research Corporation (4 from 3,777 patents)
36 patents:
1. 12463044 - Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
2. 11935756 - Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
3. 11335563 - Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
4. 10784086 - Cobalt etch back
5. 10607844 - Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
6. 10096483 - Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
7. 9870899 - Cobalt etch back
8. 9761457 - Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
9. 9679781 - Methods for integrated circuit fabrication with protective coating for planarization
10. 9589853 - Method of planarizing an upper surface of a semiconductor substrate in a plasma etch chamber
11. 9570320 - Method to etch copper barrier film
12. 9330934 - Methods of forming patterns on substrates
13. 9305782 - Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
14. 9184159 - Simplified pitch doubling process flow
15. 9003651 - Methods for integrated circuit fabrication with protective coating for planarization