Applied Materials, Inc.

Talia Technology Ltd.

Avner Karpol

Boaz Kenan

Silviu Reinhorn

Shimon Yalov

Emanuel Elysaf

Emanuel Elyasaf

Ehud Tirosh

Yair Eran

Emanuel Binnun

Ran Zeimer

A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

Method and apparatus for article inspection including speckle reduction

A reticle inspection system for inspecting reticles can be used as an incoming inspection tool, and as a periodic and pre-exposure inspection tool. Mask shops can use it as an inspection tool compatible to their customers, and as a printable error detection tool. The inventive system detects two kinds of defects: (1) line width errors in the printed image; (2) surface defects. The line width errors are detected on the die area. The detection is performed by acquiring the image of the reticle under the same optical conditions as the exposure conditions, (i.e. wavelength, numerical aperture, sigma, and illumination aperture type) and by comparing multiple dies to find errors in the line width. Surface defects are detected all over the reticle. The detection of surface defects is performed by acquiring transmission and dark-field reflection images of the reticle and using the combined information to detect particles, and other surface defects.

Method and apparatus for reticle inspection using aerial imaging

A method and apparatus for early detection and classification of retinal pathologies, especially glaucoma and macular edema. The method comprises; (a) illuminating predetermined locations on the retina; (b) receiving light returning from predetermined locations; (c) generating a series of primary graphs corresponding to the light intensity with respect to retinal depth of predetermined locations on the retina; (d) separating the component curves of said graphs; (e) analyzing said component curves to produce data including data corresponding to the front slope and/or the back slope, and/or the area of at least one of said component curves; (f) comparing said data to analogous pre-specified data.

Method and apparatus for early detection and classification of retinal pathologies

Method of and apparatus for article inspection including speckle reduction

A system and method are presented for optical inspection of reticles by simulating the operation of a selected stepper. The system utilizes a flying spot inspection technique and includes a scanning apparatus and a detection unit. The scanning apparatus uses a laser source similar to that of the stepper of interest. First and second light directing assemblies are accommodated in the optical paths of, respectively, incident and transmitted light, and are designed so as to provide coherence of the light substantially equal to that of the stepper.

Method and system for reticle inspection by photolithography simulation

Method for reticle inspection using aerial imaging

Disclosed is a three dimensional imaging scanning apparatus for retinal thickness and structure non-invasive analysis. The apparatus includes an optical path having a light source, common focusing optic and beam deflector for both incident and reflected beams going to and returning from the retina of an eye, and an imaging device. The apparatus further includes separate optical paths for imaging the fundus and iris of the eye. The speckles caused by retina non-uniformity can be removed by vibrating the common beam deflector during the image acquisition time. An eye model is obtained by spatially integrating images of the retina, the fundus and the iris.

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Ziona, Israel

Avner Karpol