Ciba-geigy Corporation

Ocg Microelectronic Materials, Inc.

Arch Specialty Chemicals, Inc.

Arnold Grubenmann

Manfred Hofmann

Norbert Muenzel

Philippe Bugnon

Stefan Hari

Andreas Burkhard

Rolf Schumacher

Bernhard Medinger

Ulrich Schadeli

Ulrich Schaedeli

Jean Schaefle

Photoresist compositions are described, which are sufficiently transparent in the solvent-free state for radiation of a wavelength of approximately 193 nm, and which contain nonaromatic chemical groups, which can be converted into groups with aromatic structural elements (latent aromatic groups) under process conditions, for which an image structure comprised of the resist material is not disrupted. A preferred component with latent aromatic groups is bicyclo[3.2.2]nona-6,8-dien-3-one. Resist coatings, which are produced with these compositions, show a stability in plasma etching, which is comparable with the stability of conventional resists based on phenolic resins.

Wet-chemical, developable, etch-stable photoresist for UV radiation with

Photoresist compositions are described, which are sufficiently transparent in the solvent-free state for radiation of a wavelength of approximately 193 nm, and which contain nonaromatic chemical groups, which can be converted into groups with aromatic structural elements (latent aromatic groups) under process conditions, for which an image structure comprised of the resist material is not disrupted. A preferred component with latent aromatic groups is bicyclo�3.2.2!nona-6,8-dien-3-one Resist coatings, which are produced with these compositions, show a stability in plasma etching, which is comparable with the stability of conventional resists based on phenolic resins.

Wet-chemical developable, etch-stable photoresist for UV radiation with

Mixed crystals of at least two different compounds of formula I ##STR1## wherein R is --CH.sub.3, phenyl, --COOCH.sub.3, --COOCH.sub.3, --COOC.sub.2 H.sub.5, --NHCO--C.sub.1 -C.sub.4 alkyl or --CONH--C.sub.1 -C.sub.4 alkyl, M.sup.+ and M.sub.1.sup.+ are each independently of the other an alkali metal cation, an alkaline earth metal cation or a heavy metal cation or NH.sub.4.sup.+ ; wherein X, Y, X' and Y' are each independently hydrogen, halogen, --CH.sub.3, --C.sub.2 H.sub.5, --OCH.sub.3, --OC.sub.2 H.sub.5, --NO.sub.2 or the group of formula --NHCO--C.sub.1 -C.sub.4 alkyl, wherein at least two of the cations M.sup.+ and M.sub.1.sup.+ in the compounds forming the mixed crystals of formula I are different and the X-ray diffraction patterns of the mixed crystals differ from the X-ray diffraction patterns of the individual components and of their sum. Such mixed crystals are most suitable as pigments for coloring high molecular organic material and are distinguished in particular by surprisingly high color strength and pure shade.

Mixed sodium, ammonium and/or calcium salt crystals of laked monoazo

Compositions containing an organic pigment coated with metal oxides, wherein the pigment particles are provided with a tenacious, dense, highly crosslinked coating of silica and/or alumina which is fixed by polycondensation of a silicate and/or aluminate with the free hydroxyl groups of a layer that densely coats the surface of the pigment particles and which consists substantially of partially hydrolyzed compounds of elements of group 4A or 4B of the Periodic Table selected from the group consisting of chelates of formula ##STR1## wherein R is methyl, ethyl, methoxy or ethoxy, R.sup.1 is methyl or ethyl and X is halogen or C.sub.1 -C.sub.4 alkoxy, and M is Ti or Sn, and of esters of formula

Organic pigments coated with metal oxides

The load-carrying capacity of liquid lubricants having a kinematic viscosity of 2 to 1500 mm.sup.2 /s at 40.degree. C. can be substantially improved by the addition of oil-insoluble, dispersible aromatic compounds which are chlorine-substituted in the nucleus. The compounds, which consist of 1 to 4 completely unsaturated or partially saturated aromatic moieties which may contain hetero-atoms and are linked to one another through a simple direct bond, a double bond or through --O--, --S--, --N(R)--, --N.dbd., alkylene, --NHCO--, --N.dbd.CH--, --N.dbd.N--, --N.dbd.NCH(COCH.sub.3)CONH, --CH.dbd.N--N.dbd.CH-- or .dbd.N--(Y)--N.dbd., contain from 2 to 24 aromatic chlorine atoms. The combination of the additives of the invention with conventional antiwear additives has been found to be particularly advantageous.

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Marly, Switzerland

Arnold Grubenmann