Merck Patent Gmbh

Merck Patent Gesellschaft

Steag Microtech Gmbh Sternenfels

Basf Se Corporation

Biomet Deutschland Gmbh

Armin Kübelbeck

Berthold Nies

Werner Stockum

Matthias Koch

Sylke Klein

Lilia Heider

Berthold Schum

Wilfried Schmidt

Brigitte Jeschke

Karl Appich

Martin Kallis

Claudia Zielinski

Eberhard Muhlfriedal

Claudia Wiegand

Frank Schilke

Jakob Szekeresch

Torsten Gerisch

Thomas Gölzenleuchter

The invention relates to novel etching media in the form of etching pastes for etching selected areas or the entire area of silicon surfaces and layers, in addition to the use of said media.

Etching pastes for silicon surfaces and layers

The present invention relates firstly to HF/fluoride-free etching and doping media which are suitable both for the etching of inorganic layers and also for the doping of underlying layers. The present invention secondly also relates to a process in which these media are employed.

Combined etching and doping media

The invention concerns etching and doping substances free of hydrochloric/fluoride acid used for etching inorganic layers as well as for doping subjacent layers. The invention also concerns a method wherein said substances are used.

Combined etching and doping substances

A device for coating a plate has an open channel being open in an upward direction and a device for supplying a liquid to the open channel. The liquid in the open channel forms an convexly curved portion projecting upwardly from the open channel. A device for transporting a plate at a close distance past the open channel is provided, with which a surface to be coated of the plate facing the convexly curved portion of the liquid is guided such that a thin film of the liquid is deposited on the surface to be coated by adhesion effects. Another device for lacquering or coating plates or disks has a capillary slot that is filled with a liquid coating medium. The plate to be coated is advanced across the capillary slot with the surface to be coated facing downwardly so that due to the capillary effect a thin layer is deposited on the surface of the plate.

Capillary device for lacquering or coating plates or disks

Growing community of inventors

Bensheim, Germany

Armin Kübelbeck