Carl Zeiss Smt Gmbh

Shima Seiki Manufacturing Limited

Carl Zeiss Sms Ltd.

Armin Bich

Albrecht Hof

Dietmar Neugebauer

Rolf Freimann

Matthias Manger

Bernd Doerband

Stefan Schulte

Bernd Dörband

Frank Riepenhausen

Reinhold Schimko

Günter Maul

Monika Frey

Wolfgang Scherm

Helmut Issler

Stefan Otto

Rainer Maul

Helmut Krause

Measuring a shape of an optical surface () of a test object () includes: providing an interferometric measuring device () generating a measurement wave (); arranging the measuring device () and the test object () consecutively at different measurement positions relative to each other, such that different regions () of the optical surface () are illuminated by the measurement wave (); measuring positional coordinates of the measuring device () at the different measurement positions in relation to the test object (); obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave () after interaction with the respective region () of the optical surface () using the measuring device () in each of the measurement positions; and determining the actual shape of the optical surface () by computationally combining the surface region measurements based on the measured positional coordinates of the measuring device () at each of the measurement positions.

Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device

A device for measuring lithography masks is provided, comprising

Device and method for measuring lithography masks

Flatbed knitting machine

Growing community of inventors

Aalen, Germany

Armin Bich