Lam Research Corporation

Aravind Alwan

Darrell Ehrlich

Raphael Casaes

Kevin Leung

Grayson Ford

Zhumin Han

Anthony Contreras

Richard M Blank

Peter S Thaulad

Mark E Emerson

Alejandro C Sanchez

Joanna Wu

Behnam Behziz

A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or more lift pin receiving elements. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. The one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.

Edge rings providing kinematic coupling and corresponding substrate processing systems

A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A controller is configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate.

Fixture for automatic calibration of substrate transfer robot

Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features

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Milpitas, CA, United States of America

Aravind Alwan