Wisconsin Alumni Research Foundation

Anthony K Quick

Noah H Hershkowitz

Moshe Sarfaty

Perry W Sandstrom

A device for measuring polymer build-up on plasma chamber walls provides a cooled window on which a film may form. Light passing through the window outside the chamber may be measured by interferometric techniques to determine change in film thickness and thus indicate when cleaning is required and the success of cleaning operations. A sapphire window may be used to allow for air cooling and to reduce etching by the plasma. A fiber optic cable may communicate the light between the window and measurement electronics.

Growing community of inventors

Madison, WI, United States of America

Anthony K Quick