Average Co-Inventor Count = 5.46
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Smt Gmbh (1 from 1,410 patents)
2. Carl Zeiss Sms Ltd. (1 from 83 patents)
2 patents:
1. 10055833 - Method and system for EUV mask blank buried defect analysis
2. 9261775 - Method for analyzing a photomask