International Business Machines Corporation

Andrew C Brendler

Roger M Young

Susan M Jankovsky

Danielle R Chianese

Eric Peter Solecky

Charles Neill Archie

Dmitriy Shneyder

A method for monitoring a fleet comprising a plurality of measurement tools includes collecting data for a current time interval from the fleet by a data collection module; and performing fleet measurement precision (FMP)/tool matching precision (TMP) analysis on the collected data by a FMP/TMP analysis module, wherein FMP/TMP analysis comprises determining a TMP for each of the plurality of measurement tools using a static and a dynamic benchmark measuring system (BMS); and determining a FMP for the fleet using the static and the dynamic BMS; and determining if the FMP is above a predetermined threshold by a fleet improvement module, and in the event the FMP is above the predetermined threshold, identifying at least one tool of the plurality of tools as poorly performing based on the TMPs; and flagging the identified at least one tool for improvement.

Measurement tool monitoring using fleet measurement precision and tool matching precision analysis

Dynamic offset determination for each of a plurality of measurement systems for matching the systems is disclosed. One embodiment uses an artifact which is periodically run across the measurement system to be matched. Inputs for each run include the current offsets and historical data for the entire fleet and the new test measurement for the current measurement system under test. Evaluation based on exponentially weighted moving average and median calculation techniques may result in a new, reset offset for one or more measurement systems. The reset offset(s) is then applied to product measurements to nullify any tool matching issues.

Offset determination method for measurement system matching

Offset determination for measurement system matching

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Lagrangeville, NY, United States of America

Andrew C Brendler