Average Co-Inventor Count = 9.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Smt Gmbh (2 from 1,405 patents)
2 patents:
1. 11048172 - Method for producing an illumination system for an EUV projection exposure system, and illumination system
2. 10514608 - Method for producing an illumination system for an EUV projection exposure system, and illumination system