Applied Materials, Inc.

Scitex Inc.

Creoscitex Corporation Ltd.

Amir Komem

Serge Steinblatt

Gilad Almogy

Ron Naftali

Ilan Ben Oren

Josef Ronen

Boris Golberg

Boris Goldberg

Erel Milshtein

Iian Ben Oren

Method and apparatus for optical inspection of a patterned article are presented. A region on the article is illuminated with incident light to produce light returned from the illuminated region. An image of the illuminated region is acquired and analyzed for determining the intensity distribution of light components scattered from the pattern of the illuminated region within a certain collection angular field located outside a solid angle of propagation of specularly reflected light. Based on the determined distribution, light components scattered from the illuminated region and propagating with at least one predetermined solid angle segment of the certain collection angle are collected and directed to a dark-field detection unit.

Optical inspection method and apparatus utilizing a collection angle design

Method and apparatus for optical inspection of an article are presented. The apparatus comprises an illumination unit and at least one detection unit. The illumination unit generates an incident beam and directs it onto a predetermined region of the article. The detection unit includes a light collection system and a detector. The light collection system collects light scattered from the illuminated region with a predetermined constant maximum collection angle, and utilizes a variable angle design for selectively selecting from collected light at least one light component propagating with a solid angle segment of the maximum collection angle, and directing it to the detector.

Optical inspection method and apparatus utilizing a variable angle design

An imaging system for imaging a plurality of macropixels onto a media and a method for generating a linear array of macropixels to be imaged onto a media utilizing a two dimensional spatial light modulator having a plurality of micropixels grouped together to form a plurality of linear arrays of macropixels is provided. The imaging system includes a light source for generating a beam of light; a projection lens assembly for focusing the beam of light; a deflector illuminated by the light beam output from the projection lens assembly, the deflector able to deflect the light beam in the vertical (Y-axis) direction; an anamorphic lens assembly illuminated with the light beam output from the deflector; a two dimensional spatial light modular (SLM) including a plurality of micropixels, the plurality of micropixels grouped together to form a plurality of linear arrays of the micropixels, and an imaging lens assembly coupled to the output of the spatial light modulator. The spatial light modulator controls the passage of light through each of the macropixels, the linear arrays being illuminated one at a time in sequential order. The imaging lens assembly images onto the media, a line spot on the deflector in the vertical (Y-axis) direction and the output of the spatial light modulator in the horizontal (X-axis) direction.

Apparatus and method for recording an image

A novel optical system operative to transfer, with high efficiency, optical power from a line source, such as a LDB, built from a plurality of individual light sources with different angular distribution in two orthogonal axis into a rectangular area with a particular aspect ratio and two different numerical apertures. The near field pattern of a LDB is imaged onto the plane of an SLM. The system utilizes light generated from an LDB having a plurality of individual light sources to illuminate a microlens array. The microlens array, consisting of a plurality of microlenses, functions to collimate the light from the LDB in the slow axis. An optical element adjacent the microlens array refracts the light in the fast axis. In the slow axis, the light from the microlens array is incident upon an optical element which focuses the light onto the SLM plane such that the light from each point light source illuminates the entire active pixel area of the SLM. An additional optical element focuses the light in the fast axis to generate the required spot image. The optical system of the present invention utilizes natural aberrations and/or artificial aberrations to decrease the sensitivity of the optical system to the smile phenomena exhibited by most laser diode bars.

Spatial light modulator illumination system

Optical system for illuminating a spatial light modulator

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Tel Aviv, Israel

Amir Komem