Kla Tencor Corporation

Alpa Kohli

Ashok V Kulkarni

Brian Duffy

Eliezer Rosengaus

Kris Bhaskar

Mohan Mahadevan

Santosh Bhattacharyya

Chris Maher

Aneesh Khullar

Chetana Bhaskar

Cecelia Anne Campochiaro

Lalita A Balasubramanian

Lalita Balasubramanian

Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.

Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions

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Saratoga, CA, United States of America

Alpa Kohli