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Wacker-chemitronic Gesellschaft Fur Elektronik-grundstoffe Mbh

Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Ag

Alfred Buchner

Theresia Bauer

Reinhold Wahlich

Wilfried Von Ammon

Franz Kuhn-Kuhnenfeld

G&uuml;nther Obermeier

Gunther Obermeier

Walter Auer

J&uuml;rgen Hage

Rasso Ostermeir

A semiconductor wafer has a front side a back side a top layer a bottom layer an upper inner layer lying below the top layer a lower inner layer lying above the bottom layer a central region between the layers and an uneven distribution of crystal lattice defects. The concentration of the defects exhibits a first maximum (max ) in the central region and a second maximum (max ) in the bottom layer

Semiconductor wafer with crystal lattice defects, and process for producing this semiconductor wafer

A semiconductor wafer has a front side , a back side , a top layer , a bottom layer , an upper inner layer lying beneath the top layer , an lower inner layer lying above the bottom layer , a central region between the layers and , and an uneven distribution of crystal lattice defects. The crystal lattice defects are substitutionally or interstitially included nitrogen or vacancies.

Semiconductor wafer with crystal lattice defects, and process for producing this wafer

Point defects or impurities, which are detrimental to the quality of elecnic components, can be eliminated by means of rearsurface damage, which induces dislocations and/or stacking faults, by means of mechanical stress to the semiconductor wafers used in the manufacture of those components. For this purpose, the semiconductor wafers are brought into contact, before polishing, oxidation and thermal treatment, with moving carrier bodies covered with an elastic carrier medium having abrasive grain bonded to it, which creates the desired mechanical stress by forming a large number of very fine scratches and fissures in the surface of the semiconductor wafers.

Process for the backside-gettering surface treatment of semiconductor

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Pischelsdorf, Austria

Alfred Buchner